Derivation of pair distribution functions for interface interdiffusion analysis for multilayered thin films using high-energy electron diffraction

High-energy electron diffraction has been used to obtain reduced density fu nctions from multilayered thin films. Due to the very nature of the experim ent, only interatomic correlations perpendicular to the incoming electron b eam are responsible for the scattered intensity. This allows an investigati on of the interface interdiffusion of inner surfaces. Since no specimen pre paration is needed, the technique is uninfluenced by preparation artefacts. We describe the theory and the experimental requirements for the applicati on of this method and present results obtained for a terbium/iron multilaye r film.