ANALOG DELAY-LOCKED LOOP FOR SPATIAL-PHASE LOCKING

Authors
GOODBERLET J FERRERA J SMITH HI
Citation
J. Goodberlet et al., ANALOG DELAY-LOCKED LOOP FOR SPATIAL-PHASE LOCKING, Electronics Letters, 33(15), 1997, pp. 1269-1270
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
33
Issue
15
Year of publication
1997
Pages
1269 - 1270
Database
ISI
SICI code
0013-5194(1997)33:15<1269:ADLFSL>2.0.ZU;2-F
Abstract
An analogue delay-locked loop has been developed for spatial-phase loc king in a scanning electron-beam lithography system. The loop improves pattern-placement precision to 3 sigma similar or equal to 12 nm, by referencing all writing to a 400 nm-period grating. Results compare we ll with a numerical simulation.