E. Hristova et al., ELLIPSOMETRIC AND RAMAN-SPECTROSCOPIC STUDY OF THERMALLY FORMED FILMSON TITANIUM, Journal of the Electrochemical Society, 144(7), 1997, pp. 2318-2323
Thermal films on titanium surfaces were formed by heating titanium sam
ples in air at atmospheric pressure. The optical constants, thickness.
and structure of the formed films at various temperatures and times o
f heating were investigated by ellipsometry and Raman spectroscopy. Th
e complex index of refraction and the thickness of generated films wer
e determined by comparing the experimental loci Delta and Psi obtained
by ellipsometric measurements with theoretical computed Delta vs. Psi
curves. It was found that the thickness inhomogeneity and porosity of
formed films increase with increasing temperature and the duration of
the thermal treatment. Beyond a certain critical temperature, the app
earance of some Raman bands and changes in their intensities indicated
that the film transformed from amorphous to microcrystalline and crys
talline structure.