Advanced Plasma Surface Modification System for high energy metal ion beamassisted deposition

Physical vapour deposition (PVD) is a standard industrial process used to d eposit hard coatings on cutting tools, gears, bearings, piston rings, etc. It has also been discovered that metal ion implantation of PVD deposited co atings greatly increases the wear resistance of these components. The next logical step is to coat and implant in the same chamber. Through funding fr om the US Department of Energy, Cutting Edge Products Inc., Poway, CA (near San Diego) has developed an Advanced Plasma Surface Modification System wh ich combines the world's largest metal ion implanter with cathodic are depo sition sources to allow parts to be sputter cleaned, coated, and metal ion implanted without breaking vacuum.