Reflection energy electron loss spectra (REELS) have been measured for seve
ral metals and semiconductors {Be, Al, Si, V, Fe, Co, Ni, Cu, Ge, Mo, Pd, T
e, Ta, W, Au, Pb) in the medium energy range {150-3400 eV) for normal incid
ence and an emission direction of 60 degrees with respect to the surface no
rmal. The ratio of the number of electrons that induced a surface excitatio
n to the intensity of the elastic peak was extracted from each spectrum pro
viding the so-called surface excitation parameter {SEP). This quantity is e
qual to the average number of surface excitations an electron experiences w
hen it crosses the surface once. For the nearly free-electron materials the
results agree reasonably with free-electron theory while significant devia
tions are observed for the other materials. In all cases the SEP is found t
o be inversely proportional to the speed of the probing particle. It is gen
erally found that the surface excitation parameter decreases with the gener
alized plasmon energy. A simple predictive formula to estimate the surface
excitation parameter for medium energy electrons entering or leaving an arb
itrary material is proposed. (C) 2001 Elsevier Science B.V. All rights rese
rved.