Electron energy loss spectroscopy (EELS) and Auger electron spectroscopy (A
ES) have been used to monitor the formation of Rh films on ZrO2(100) single
crystalline substrates. Rhodium was evaporated step by step at various sub
strate temperatures. The surface morphology of the deposited material influ
ences EELS spectra, so that the relative metal coverage of the substrate ca
n be calculated. The EELS and AES results were compared and the conclusions
concerning the deposit morphology were verified by means of transmission e
lectron microscopy. (C) 2001 Elsevier Science B.V. All rights reserved.