Cross-sectional high-resolution transmission electron microscopy observation of Si(113) 3 x 2 structure

Atomic structure of Si(113) 3 x 2 reconstructed surface was examined by hig h-resolution transmission electron microscopy (HRTEM). Cross-sectional atom ic structure of the Si(113) 3 x 2 was observed along [(1) over bar 10] dire ction at specimen temperature of about 800 K inside an ultrahigh vacuum tra nsmission electron microscope. Simulated images for some probable structure models were compared with the experimental HRTEM images. It was found that , if void area in Ranke's model is filled by adatom so that a row of adatom s is created, the simulated HRTEM image shows good agreement with the obser ved one. The structure model recommended by Dabrowski et al. [Surf. Sci. 33 1-333 (1995) 1022; Phys. Rev. Lett. 73 (1994) 1660] was not able to explain the HRTEM images obtained in the present work. (C) 2001 Elsevier Science B .V. All rights reserved.