Simulation of sputtering induced by light ions

A new simulation code named projectile surface interaction simulation (PSIS ) has been used to Study the extension of the collision cascades in sputter ing induced by light projectiles. PSIS is based on the binary collision app roach in a crystalline target. It is similar to the time independent versio n of MARLOWE but it takes advantage of the magic formula proposed by Biersa ck and used in the code TRIM. Results on the simulation of He on polycrystalline barium, confirms that sp uttering is produced mainly by direct emission or short-range cascades. How ever, a non-negligible fraction of particles are emitted far away from the projectile entrance point and from deep layers. Channeling of the projectil e and of target atoms in the solid is proposed to explain these results. (C ) 2001 Elsevier Science B.V. All rights reserved.