Bulk diffusion of microwave plasma activated deuterium into undoped natural diamond

In the present work undoped natural (100)-, (111)-, and (110)-oriented diam onds were exposed to microwave deuterium plasma. Secondary ion mass spectro scopy (SIMS) in static mode showed that surface deuterium concentration is the highest for (110) surface and the lowest one for (100)-oriented diamond . SIMS depth profile measurements unambiguously revealed the bulk diffusion of deuterium in the concentration of 10(20)-10(21) atoms/cm(3). Relative b ulk concentrations of deuterium in the three differently oriented diamonds retained those on the surface. The measured diffusion length of deuterium i s similar to0.6 mum. These results support previously performed theoretical calculations and enlighten the data obtained from absolute quantum photoyi eld measurements of hydrogenated natural diamond recently reported by us. ( C) 2001 American Institute of Physics.