Ultra-short pulsed laser ablation of polymers

We report the experimental results of the ablation rate per pulse as a func tion of the laser fluence and images of the surface morphology, as examined by atomic force microscopy, for a number of organic polymer materials of s pecial interest in microelectronics and biomedical applications. The ablati on parameters and the surface modifications are examined under various irra diation conditions using laser wavelengths ranging from the ultraviolet thr ough the visible to the infrared and pulse widths ranging from nanoseconds to femtoseconds. Our results are discussed in the view of interplay between the material properties and the radiation dependent parameters governing t he ablation process. Visible and infrared ultra-short pulsed laser ablation of the polymer samples was performed with a very low threshold fluence of approximately 0.2 mJ/mm(2). The irradiated polymers exhibit different optic al transmission properties in the corresponding spectral regions. The quant itative results on ablation rate versus laser energy fluence show that the picosecond laser ablation is more efficient than the subpicosecond and nano second ablation, i.e., it exhibits higher etch rates before the onset of an y saturation. (C) 2001 Elsevier Science B.V All rights reserved.