Laser-induced surface drilling of silicon carbide

Laser microdrilling was performed on the surface of silicon carbide compone nts, in order to investigate the surface modification in relationships with the laser processing parameters. Several SiC surfaces were laser textured with blind microholes different in shape and size and were analyzed. CO2 la ser irradiation was proved to be efficient in producing regular shaped micr oholes due to the advantages of both small and focused spot size and comple te control of individual pulse shape and power. Hole size (diameter and dep th) and microstructural modification were related to laser processing param eters. On the basis of the preliminary tests carried out, regularly pattern ed surfaces were produced with a suitable choice of laser parameters. (C) 2 001 Elsevier Science B.V. All rights reserved.