Optimized operations by extended X-factor theory including unit hours concept

Citation
M. Kishimoto et al., Optimized operations by extended X-factor theory including unit hours concept, IEEE SEMIC, 14(3), 2001, pp. 187-195
Citations number
14
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
ISSN journal
08946507 → ACNP
Volume
14
Issue
3
Year of publication
2001
Pages
187 - 195
Database
ISI
SICI code
0894-6507(200108)14:3<187:OOBEXT>2.0.ZU;2-K
Abstract
The relationships between tool performance, cycle time, and throughput have been described to achieve the highest productivity. Though tool utilizatio n is low for manually operated tools, long waits prior to product processin g lead to a productivity loss in our production line. We focus on operator efficiency in the CMP (chemical mechanical polishing) operation, which, as a typical manually operated tool, influences cycle time. This paper introdu ces an online/offline unit hour analysis method, which has been designed to optimize operator allocation and headcount in our production line, using X -factor theory in order to achieve the shortest cycle time. By using online /offline unit hour analysis with X-factor theory, the root cause of waiting time can be identified and the relationship between operator headcount and cycle time can be described. The waiting time can be reduced by 35% and th e cycle time can be reduced by 25%, according to a simulator with optimized operator allocation and headcount based on online/offline unit hour analys is.