A simulation-based experiment for comparing AMHS performance in a semiconductor fabrication facility

As the cost and complexity of constructing a semiconductor fabrication faci lity increases, responsive tools are needed for designing and planning its operations. Discrete-event simulation paired with design of experiments is an effective combination. This article demonstrates how simulation in combi nation with design of experiments is used to compare the intrabay layout of two automated material handling systems. The difference in stocker robot u tilization, number of vehicle moves per hour, and average delivery time for the two intrabay layouts will be compared using a fractional factorial exp erimental design. The study demonstrates that the distributed storage optio n is preferable for maximizing manufacturing performance. The solution proc edure has general applicability as a tutorial for practitioners.