The feasibility of bonding 50-mm-diameter Si with a Au/AuBe mirror to AlGaI
nP light-emitting diode (LED) wafers is demonstrated. Wafer bonding over th
e entire wafer area is achieved while the metallic mirror still maintains h
igh reflectivity. Using this technique, the mirror-substrate AlGaInP LEDs a
re fabricated across an entire 50-mm wafer. The test data show that 98% of
the dice with operating voltages <2.2 V at 20 mA and 85% of the dice with l
uminous intensity in the 130<similar to>140 mcd region. The wafer-bonded mi
rror-substrate LED lamps operating at 626 nm can emit 3 lm at 20 mA with a
forward voltage of 2 V, corresponding to a luminous efficiency of 74 lm/W.
Moreover, they present a peak power efficiency of 21% with 4 mW output at 1
0 mA (1.9 V). Essentially no degradation is observed for these LEDs after 2
000 h stress at 80 degreesC and 50 mA (55.6 A/cm(2)). The results indicate
the mirror-substrate AlGaInP LEDs of highly reliable and efficient performa
nce.