Structural observation of PZT system film in the use of pulsed-laser deposition method

This paper reports the structural observation of the lead zirconate titanat e system formed in the pulsed laser deposition method. Scanning electron mi croscopy and X-ray diffraction was used for surface and the crystal structu re observation. The target materials are prepared in the conventional solid state reaction method in oxide powder. Perovskite structure was formed on the magnesium oxide substrate. On the other hand, this is not the case on t he silicon substrate, which has a pyrochiore or amorphous and relatively vo id structure. This shows that the film formation behavior depends on not on ly the formation condition, e.g. temperature, vacuum ratio etc., but also o n the substrate material. (C) 2001 Elsevier Science Ltd. All rights reserve d.