Processing of a multilayer bender type actuator

A PZT material with high d(31) was developed and the processing of a bendin g type multilayer actuator by stacking and co-firing platinum electroded ta pe cast layers was investigated. The thermocompression step, as well as the binder burnout heating profile, proved to be critical and a tempering proc ess was introduced that prevents the microcracks formation during densifica tion. All the processing steps were optimized and prototype actuators made of 11 layers, each layer being 50 mum thick, were fabricated. The final mic rostructure was studied as well as the no-load deflection at increasing dri ving voltage. (C) 2001 Elsevier Science Ltd. All rights reserved.