A possibility of preparing Bi2O3 and BiVO4 nanolayers by ionic deposition o
n the silica surface was shown for the first time. The influence of the con
centration and pH of reactant solutions and of the number of ionic depositi
on cycles on the kinetics of the nanolayer growth was studied. The conditio
ns were determined for the formation of a nanolayer by a reaction in a laye
r of ions sorbed on the surface. The thickness of the synthesized layers wa
s determined by ellipsometry. The layer compositions were studied by X-ray
spectral microanalysis, X-ray photoelectron spectroscopy, and UV and IR Fou
rier transform spectroscopy. The structure of the layers was studied by pow
der X-ray diffraction.