Bringing a new fab on-line: How TSMC Fab 6 got up and running

Authors
Tsai, MS
Citation
Ms. Tsai, Bringing a new fab on-line: How TSMC Fab 6 got up and running, SOL ST TECH, 2001, pp. S19
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
SOLID STATE TECHNOLOGY
ISSN journal
0038111X → ACNP
Year of publication
2001
Supplement
S
Database
ISI
SICI code
0038-111X(200108):<S19:BANFOH>2.0.ZU;2-1