The kinetics of a diamond-like film growth in a microwave gas discharge plasma

Authors
Suzdal'tsev, SY Yafarov, RK
Citation
Sy. Suzdal'Tsev et Rk. Yafarov, The kinetics of a diamond-like film growth in a microwave gas discharge plasma, TECH PHYS L, 27(8), 2001, pp. 656-658
Citations number
3
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
TECHNICAL PHYSICS LETTERS
ISSN journal
10637850 → ACNP
Volume
27
Issue
8
Year of publication
2001
Pages
656 - 658
Database
ISI
SICI code
1063-7850(2001)27:8<656:TKOADF>2.0.ZU;2-A
Abstract
Spontaneous variations of the microstructure and properties of carbon films during deposition in a microwave gas discharge plasma were studied. The io n current component of the gas discharge plasma favors the selective growth of a diamond-like phase with a thickness exceeding that achieved in the ca se of a pyrolytic deposition process. (C) 2001 MAIK "Nauka/Interperiodica".