Minority-carrier diffusion lengths of electrons and holes were measured in
a GaN-based light-emitting diode using the electron-beam-induced current te
chnique in the line-scan configuration. A theoretical model with an extende
d generation source and a nonzero surface recombination velocity was used t
o accurately extract the diffusion length of the p- and n-type layers. A mi
nority-carrier diffusion length of L-n = (80 +/-6) nm for electrons in the
p-type GaN layer, L-p = (70 +/-4) nm for holes in the n-type GaN:Si,Zn acti
ve layer, and L-n = (55 +/-4) nm for electrons in the p-type Al0.1Ga0.9N la
yer were determined. The results from this model are compared with two simp
ler and widely used theoretical models. (C) 2001 American Institute of Phys
ics.