Multi-anode sawtooth SDD for X-ray spectroscopy fabricated on NTD wafers

We are developing a multi-anode sawtooth silicon drift detector (MSSDD) wit h an anode pitch of 250 mum for one-dimensional position-sensitive detectio n of low-energy X-rays down to similar to 200 eV. The detector is intended to be used in X-ray diffraction analysis. In this paper, we present new res ults of X-ray spectroscopy measurements with detectors fabricated on neutro n transmutation doped (NTD) wafers with a thickness of 290 mum. Using an MS SDD with an anode pitch of 250 mum and having p(+) strips on both sides, we have measured an energy resolution of 191-eV full-width half-maximum (FWHM ) per anode pixel for the 5.89 keV line of Fe-55 at 213 K. At room temperat ure the energy resolution is 375 eV FWHM. Split events are almost completel y eliminated due to the sawtooth-shaped p(+) strips.