Modeling of nonlinear micromechanical resonators and their simulation withthe harmonic-balance method

Citation
T. Veijola et T. Mattila, Modeling of nonlinear micromechanical resonators and their simulation withthe harmonic-balance method, INT J RF MI, 11(5), 2001, pp. 310-321
Citations number
24
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING
ISSN journal
10964290 → ACNP
Volume
11
Issue
5
Year of publication
2001
Pages
310 - 321
Database
ISI
SICI code
1096-4290(200109)11:5<310:MONMRA>2.0.ZU;2-5
Abstract
A model for a micromachined electrostatically driven high-Q beam resonator is constructed of nonlinear voltage-controlled current and charge sources. Its characteristics are simulated with the harmonic-balance method in the R F simulation program APLAC demonstrating both the spring softening and hard ening effects in the capacitive transducer and in the nonlinear mass-spring systems. Measured large-signal frequency-domain transfer characteristics o f a test resonator structure at various signal levels were accurately repro duced by model simulations. (C) 2001 John Wiley & Sons, Inc.