T. Veijola et T. Mattila, Modeling of nonlinear micromechanical resonators and their simulation withthe harmonic-balance method, INT J RF MI, 11(5), 2001, pp. 310-321
Citations number
24
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING
A model for a micromachined electrostatically driven high-Q beam resonator
is constructed of nonlinear voltage-controlled current and charge sources.
Its characteristics are simulated with the harmonic-balance method in the R
F simulation program APLAC demonstrating both the spring softening and hard
ening effects in the capacitive transducer and in the nonlinear mass-spring
systems. Measured large-signal frequency-domain transfer characteristics o
f a test resonator structure at various signal levels were accurately repro
duced by model simulations. (C) 2001 John Wiley & Sons, Inc.