The avalanche multiplication and excess noise properties of a range of subm
icron Si diodes have been measured and analyzed using a model for impact io
nization which includes the effect of dead space, modified to allow for a g
radual onset of ionization, with realistic threshold energies. Good agreeme
nt is achieved between the predictions of this "soft dead space" model and
measurements of multiplication and excess noise, both on a range of submicr
on diodes with uniform electric fields and also on a p(+)n diode with a hig
hly nonuniform electric field. (C) 2001 American Institute of Physics.