Surface reconstructions and adatom kinetics of silicon on GaN(0001) and (00
01) surfaces are studied by scanning tunneling microscopy, electron diffrac
tion, and first-principles calculations. For silicon coverage near 0.5 mono
layer, a 2 X 2 structure is observed, and is interpreted in terms of a mode
l consisting of a Ga adatom on a monolayer of 3 Ga+ 1Si and a Si-Ga atom in
the third layer. For higher silicon coverage, disordered 2 X 2 domains and
"1 X 1" domains are found to coexist. After annealing above 300 degreesC t
he "1 X 1" regions become dominant and a 4 X 4 structure is seen near step
edges. It is concluded that the silicon adatoms tend to reside in subsurfac
e sites on the Ga-polar surface. Surface morphology in the presence of Si i
s smooth for the (0001) surface but rough for the (0001) surface. This diff
erence is attributed to the presence of multiple Ga surface layers in the f
ormer case, which enhance surface diffusivities. (C) 2001 American Vacuum S
ociety.