Solution of the plasma-sheath equation with a cool Maxwellian ion source

The plasma-sheath equation with a cool Maxwellian ion source is solved usin g a hybrid simulation with kinetic ions and Boltzmann electrons. Results ar e shown for ion source temperatures T-S of 0.003 to 1.0 times the electron temperature T-e. When T-S less than or similar to 0.1T(e), the potential an d density profiles in the plasma are well approximated by cold Tonks-Langmu ir theory. However, the shape and width of the ion velocity distribution fu nction depend sensitively on the source temperature. The calculated distrib ution functions agree qualitatively with the experimental measurements of B achet [Phys. Plasmas 2, 1782 (1995)]. (C) 2001 American Institute of Physic s.