Metal-oxide-silicon dosimeters with a very thick gate oxide in a stack-conn
ected configuration are studied with respect to their capability to measure
a low dose. It is shown that if the temperature is controlled to +/-5 degr
eesC during reading a dose as low as 10(-4)Gy can be measured with 10% accu
racy. (C) 2001 Elsevier Science Ltd. All rights reserved.