Development of single- and multi-layered metallic films on diamond by ion beam-assisted deposition

Metallization of a chemical vapor-deposited diamond submount was prepared b y ion beam-assisted deposition (IBAD). The IBAD process allowed the selecti on of metal species of particular interest, and control of the ion energy, leading to the formation of single- and multi-layered metal films on the di amond submount. The thermal stability after post-deposition annealing of th ree metallization systems, including Ni/Ti/diamond, Cr/Ti/diamond and W/Ti/ diamond, with a eutectic AuSn layer magnetron sputter-deposited on top of t hese metallization schemes, was studied by Rutherford backscattering spectr ometry. Results in relation to layer intermixing and metal-substrate adhesi on are discussed. (C) 2001 Elsevier Science B.V. All rights reserved.