Hot filament CVD method can be used to grow micron-sized diamond crystals o
f several millions per square centimeter. These crystals possess fully deve
loped facets. Such euhedral diamond crystals of uniform size may not scratc
h workpieces. Moreover, the smooth surfaces can minimize the adhered impuri
ties, therefore the contamination of products may be avoided. They are the
ideal superabrasives for polishing high valued materials such as semiconduc
tors. (C) 2001 Elsevier Science B.V. All rights reserved.