K. Hayashi et al., Temporal response of UV sensors made of highly oriented diamond films by 193 and 313 nm laser pulses, DIAM RELAT, 10(9-10), 2001, pp. 1794-1798
Ultraviolet sensors were fabricated on a Si substrate using an undoped, hig
hly oriented diamond film with Pt and Al interdigited electrodes with a gap
length of 5, 10 and 15 mum. Transient voltage outputs due to photocurrent
of the sensors under a bias voltage of 20, 40 and 80 V were measured by the
pulsed irradiation of an ArF excimer laser (lambda = 193 am, pulse width =
5 ns) or a dye laser (lambda = 313 nm, pulse width = 7 ns). It was found t
hat the transient voltage output by the ArF laser irradiation on a sensor (
Pt electrodes with a 15-mum gap) consisted of main and second peaks at 1.1
and 3.8 ns, respectively, when the bias voltage was 20 V. The FWHM was appr
oximately 4 ns. The second peak was observed in the output signals of most
sensors. On the other hand, the voltage output was two orders of magnitude
weaker when the sensors were irradiated by the dye laser. (C) 2001 Elsevier
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