The linearity of a class-A, bipolar UHF power transistor is investigated. T
he device is intended for transmission of signals with multiple (TV) channe
ls. Mixing between the various channels must be suppressed, which makes lin
earity an important parameter. This paper presents a novel approach, where
process technology is specifically optimized to minimize distortion. It is
shown that particularly the nonlinear collector-base capacitance strongly a
ffects the linearity of this type of device. With a modified collector-base
doping profile, the capacitance is manipulated. A nonuniform profile is in
troduced that significantly reduces third-order intermodulation. The profil
e consists of an arsenic doped spike that is grown epitaxially into the (ot
herwise) lightly doped collector. This reduces the bias dependence of C-cb
and improves the tradeoff between linearity and breakdown or ruggedness. Th
e reduction in third-order intermodulation is demonstrated both experimenta
lly and by mixed-level MDS/MAIDS simulations.