Micro supplies to power MEMS devices

Authors
Mullins, J
Citation
J. Mullins, Micro supplies to power MEMS devices, IEEE SPECTR, 38(9), 2001, pp. 23-24
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
IEEE SPECTRUM
ISSN journal
00189235 → ACNP
Volume
38
Issue
9
Year of publication
2001
Pages
23 - 24
Database
ISI
SICI code
0018-9235(200109)38:9<23:MSTPMD>2.0.ZU;2-2