The higher order nonlinear dielectric imaging technique using scanning nonl
inear dielectric microscopy (SNDM) is investigated. The resolution of the h
igher order nonlinear dielectric imaging is much higher than that of the co
nventional nonlinear dielectric imaging which detects the lowest order of t
he nonlinear dielectric constant. It is demonstrated that this higher order
imaging is very useful for observing a surface layer with a unit cell scal
e thickness formed on ferroelectric material.