Using the multiple-carrier model, the process of thermal/electric-field pol
ing in fused silica is analyzed in this study for the first time. The depic
tion region may be composed of a positively charged layer, an ionosphere la
yer and a negative depletion layer, and the charge density distribution in
the depletion region is derived and obtained. The calculation results show
that the distribution of the charge density in the entire depletion region
has a quasi-step profile, and both the positively charged region and the ne
gative depletion layer have an approximately uniform distribution. Expressi
ons for the depletion width and the electric field distribution in the depl
etion region are obtained. Theoretical results show that the peak electric
field is located in the interior of the depletion region, and the internal
electric field is about 10(9) V/m, up to two orders of magnitude higher tha
n the applied initial poling field.