Fabrication of a micropatterned ridge embedded in a magnetooptic film

Citation
Y. Okamura et S. Yamamoto, Fabrication of a micropatterned ridge embedded in a magnetooptic film, JPN J A P 2, 40(5A), 2001, pp. L434-L436
Citations number
10
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Volume
40
Issue
5A
Year of publication
2001
Pages
L434 - L436
Database
ISI
SICI code
Abstract
We report the fabrication of a crystal or an amorphous micropatterned ridge buried in a magnetooptic film by use of the selected-area sputter epitaxy. The ion-beam bombardment on the deposited amorphous film was found to be i nfluential in crystal growth on an amorphous region. We successfully formed a crystalline single patterned-ridge with 3 mum width. whose cross section was inverted-trapezoidal. into an amorphous region. and an amorphous singl e patterned-ridge, whose cross section was triangular, into a crystal regio n.