Temperature compensation with A1N film on Y-128 degrees LiNbO3

Y-128 degrees LiN-bO(3) is a well-known high-electromechanical-coupling Sur face Acoustic Wave (SAW) material, but its usefulness is limited because of its poor temperature-stablility property. AIN films have some excellent ch aracteristics. such as high SAW velocity, stable chemical properties, and h igh-temperature stability. In this research, the c-axis-oriented AIN films were successfully prepared on Y-128 degrees LiNbO3 by the sputtering method and a SAW delay line oscillator under various temperatures was used to mea sure the temperature coefficient of frequency (TCF) value of this structure . For Y-128 degrees LiNbO3 with an AIN layer, the TCF value was from -76.32 (ppm/degreesC) to -39.04 (ppm/degreesC) and the improved quantity was 48.8 %. The oscillator frequency at 25 degreesC also increased from 40.0909 MHz up to 41.6221 MHz. It exhibited Y-128 degrees LiNbO3 with an AIN layer that will effectively improve the poor temperature stability and enhance the SA W velocity.