A small-scale and low-power 13.56 MHz capacitively coupled plasma is genera
ted in a capillary, whose cross section is 65-500 x 500-5000 mum, on a quar
tz chip of 20 x 20 mm at atmospheric pressure. The capillary is sandwiched
between parallel-plate electrodes which are externally located on a chip. A
pi -type matching network is miniaturized and appropriately designed to sa
tisfy the resonance condition with the excitation frequency, so that helium
plasma ignites at an incident power of 1-3 W. The atomic excitation temper
ature measured from the intensity distribution of He I lines is about 1900
K at atmospheric pressure. This result suggests that a low-electronic-tempe
rature plasma is obtained.