Zirconium tin titanate thin films via aqueous polymeric precursor route

Zirconium titanate-based thin films are considered as a promising dielectri c material for the next generation of integrated microwave devices. The zir conium tin titanate (ZTS) precursor was prepared via a polymeric precursor process in aqueous phase. based on the citrate route. The presented chemica l procedure is original for this kind of materials. C-13 nuclear magnetic r esonance (NMR) spectra showed that stable mixed-metal chelate complex has b een formed. The viscous resin was multiple spin-coated with intermediate fi rings at 300 degreesC onto platinized Si substrates and fired in air at 700 degreesC. Thin films 200-nm thick were obtained. Atomic force microscope ( AFM) analysis showed that the coverage is homogeneous, the surface texture consisting of elongated grains of average size 20 X 36 nm. Grazing incidenc e X-ray diffraction analysis (GIXRD) indicated that only the zirconium tin titanate phase is present within the examined range of penetration depth. ( C) 2001 Elsevier Science BN. AA rights reserved.