Authors
Citation
W. Osten, Optical microsystems metrology, OPT LASER E, 36(2), 2001, pp. 75-76
Categorie Soggetti
Optics & Acoustics
Journal title
OPTICS AND LASERS IN ENGINEERING
ISSN journal
01438166
→ ACNP
Volume
36
Issue
2
Year of publication
2001
Pages
75 - 76
Database
ISI
SICI code
0143-8166(200108)36:2<75:OMM>2.0.ZU;2-T