The investigation of microsystems using Raman spectroscopy

This paper discusses the use of Raman spectroscopy to study the functioning and reliability of microsystems. It is shown that Raman spectroscopy has s everal potential applications for this study, such as identification of mat erials, study of their crystallinity, uniformity and composition. and measu rement of local temperature and stress. Especially for the latter the techn ique has unique features: it is non-destructive, it has a good spatial reso lution (better than 1 mum), and it allows two-dimensional imaging of the st ress distribution in some materials. Examples are given for micro-electrome chanical systems and packages. (C) 2001 Published by Elsevier Science Ltd.