The optical measurement station for complex testing of microelements

The paper presents a concept of optical measurement station for complex tes ting of microelements including MEMS, MOEMS and electronic components and a ssemblies. The wide selection of examples proves that the specific measurem ent requirements are fulfilled by alternative usage of combined conventiona l and grating interferometers CI/GI (reflective surfaces), in-plane and out -of-plane ESPI (scattering surfaces) and digital holographic interferometry DHI (mixed surfaces) supported by thermovision, All these methods are real ized by integrated microinterferometer (IWaM) based on a glass waveguide or air cavity waveguide arrangements, The air cavity IWaM allows to form a th ermal output for combined thermovision CI/GI or ESPI measurements. IWaM has a compact design insensitive to mechanical vibrations and may be e asily rearranged to work with the selected measurement techniques. It is al so fully integrated with an optical microscope and it is designed to work b oth in laboratories and in production environments. (C) 2001 Elsevier Scien ce Ltd. All rights reserved.