Detection and recognition of local defects in 1D structures

The use of a scattering model, based on the double interaction model, to ex plore microdefects in 1D microstructures on flat surfaces is proposed. Due to their high sensitivity, backscattering experiments have been performed f or the case of a cylindrical fiber resting on a flat substrate. They show t hat some local defects may be identified by comparing the predictions of th e model with the experimental results. The possibilities of this procedure for quality control in semiconductor industry are envisaged. (C) 2001 Elsev ier Science B.V. All rights reserved.