Molecular flux provides process understanding

Authors
Danielson, P
Citation
P. Danielson, Molecular flux provides process understanding, R&D MAG, 43(8), 2001, pp. 65-66
Categorie Soggetti
Engineering Management /General
Journal title
R&D MAGAZINE → ACNP
Volume
43
Issue
8
Year of publication
2001
Pages
65 - 66
Database
ISI
SICI code
Abstract
Many process problems can be hidden when pressure is the only parameter mon itored, but considering and understanding the flux of gas molecules through a process chamber can reveal effects that can make or break a process.