Quantitative measurement of soft-X-ray spectrum using transmission gratingspectrometer

Transmission grating efficiencies for soft X-ray and quantum efficiencies o f X-ray CCD in the energy range of 100-1500eV were carefully calibrated on Beijing Synchrotron Radiation Facility. A model is developed to simulate th e calibrated grating efficiencies, another model is developed to calculate the CCD quantum efficiencies. The effect of CCD surface contamination on CC D quantum efficiency is also studied. Finally, a method for unfolding the s oft X-ray spectrum measured with transmission grating spectrometer is intro duced, in which the grating efficiencies, CCD quantum efficiencies and grat ing higher order overlapping have been taken into account. The developed qu antitative measurement method has been applied to obtain X-ray spectrum fro m gold plasma.