Raman spectroscopy of carbon nitride films deposited using the filtered cathodic vacuum-arc technique combined with a radio-frequency nitrogen-ion beam

Ultraviolet (UV) and visible micro-Raman-scattering spectroscopy were used to study carbon nitride films deposited using an off-plane double-bend-filt ered cathodic vacuum-are (FCVA) technique combined with a radiofrequency ni trogen-ion source, which was used to supply active nitrogen species during the deposition of carbon nitride films, The UV Raman spectra can be directl y used to determine the sp(3) C atoms in carbon nitride films. Both C-N bon ds and C = N bonds can also be observed from the deconvolution results of v isible and UV Raman spectra for carbon nitride films. The increase of nitro gen-ion energy leads to a decrease of the sp(3) C fraction, and an increase of the sp(2) C fraction, the sp(2) C cluster size, the C-N bond fraction a nd the C = N bond fraction in carbon nitride films.