Electron temperature analysis of two-gas-species inductively coupled plasma

The electron energy distribution functions and electron temperatures are me asured in Ar/He and Ar/Xe inductively coupled plasma with various mixing ra tios. The electron temperature does not change linearly with the mixing rat ios; instead it increases abruptly near P-He/PAr+He=1 and decreases rapidly near P-Xe/PAr+Xe=0. A simple model using a two-ion-species fluid model is suggested to explain the electron temperature variations, and it agrees wel l with the experimental results. (C) 2001 American Institute of Physics.