Polymeric micromechanical components with tunable stiffness

We present a microstereolithographic technique that enables the manufacturi ng of polymeric components for microelectromechanical systems. Model micros tructures were fabricated in the form of end-supported microbeams (10 mum i n diameter), in order to characterize the mechanical properties of the prod uced structures at the micron scale. The flexural modulus of these microbea ms was measured by atomic force microscopy, using cantilevers with attached metal spheres, and employed in a three-point bending geometry. Postfabrica tion treatment of the microstructures allows for the tailoring of their sti ffness. (C) 2001 American Institute of Physics.