Positive and negative photopatterning of metal oxides on silicon via bipolar electrochemical deposition

Authors
Choi, HC Buriak, JM
Citation
Hc. Choi et Jm. Buriak, Positive and negative photopatterning of metal oxides on silicon via bipolar electrochemical deposition, CHEM COMMUN, (17), 2001, pp. 1614-1615
Citations number
21
Categorie Soggetti
Chemistry
Journal title
CHEMICAL COMMUNICATIONS
ISSN journal
13597345 → ACNP
Issue
17
Year of publication
2001
Pages
1614 - 1615
Database
ISI
SICI code
1359-7345(20010907):17<1614:PANPOM>2.0.ZU;2-G
Abstract
Negative and positive microscale patterning of metal oxides is efficiently and rapidly carried out on flat Si(100) surfaces via a simple white light a ssisted bipolar electrochemical process.