Variable frequency microwave curing of photosensitive polyimides

Citation
Kd. Farnsworth et al., Variable frequency microwave curing of photosensitive polyimides, IEEE T COMP, 24(3), 2001, pp. 474-481
Citations number
16
Categorie Soggetti
Material Science & Engineering
Journal title
IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES
ISSN journal
15213331 → ACNP
Volume
24
Issue
3
Year of publication
2001
Pages
474 - 481
Database
ISI
SICI code
1521-3331(200109)24:3<474:VFMCOP>2.0.ZU;2-B
Abstract
Variable frequency microwave (VFM) curing was investigated as a means of ra pid curing of two photosensitive polyimides. The properties of two polymers , PI 2734 and Ultradel 7501, cured by convective heating and VFM curing wer e compared. The results of this study indicate that rapid VFM curing of the se polymers is feasible. Complete imidization was possible. The most signif icant differences in properties between VFM and thermally cured films were in the electrical properties due to the slow evolution of chemical products .