A new technique keeping off the Mn evaporant from oxygen atmosphere duringreactive evaporation process

Manganese oxide films for lithium secondary batteries were prepared using a reactive evaporation method. The Mn metal in the crucible suffers severe o xidation during the reactive evaporation process, which deteriorates it's d eposition rate with increasing deposition run. It is also difficult to main tain the stoichiometry of films from run to run. This paper shows a new tec hnique which keeps off the Mn evaporant from oxygen atmosphere during the r eactive evaporation process, To achieve it a stainless steel cell has been installed in the bottom of the Mn crucible, which can successfully isolate Mn evaporant from incoming oxygen atoms. It improves the reproducibility of film composition because of stabilizing of the deposition rate.