Characterization of plasma production by m=0 standing helicon waves

Excitation of m = 0 standing helicon waves (SHWs) of N = 1 and 3 modes (m i s the azimuthal mode number and N is the number of half-wavelengths in the axial direction) and production of high-density plasmas of the order of n(p ) similar or equal to 10(13) cm(3) have been investigated in a short cylind rical plasma column of 10 cm length [M. Nisoa, Y. Sakawa and T. Shoji: Jpn. J. Appl. Phys. 38 (1999) L777]. Excitation of different N modes of SHWs ha s caused an abrupt density jump with rf power Pr and axial static magnetic field B-0. The power-balance equation is solved using the n(p) dependence o f plasma loading resistance R obtained numerically from a two-dimensional w ave code. Calculated P-rf and B-0 dependence of stable n(p) agrees well wit h measured ones. Measured hollow (parabolic) n(p) profile caused by the exc itation of N = 1 (N = 3, 5 and travelling helicon wave) mode is explained i n terms of the perpendicular (parallel) component of wave electric field E- perpendicular to (E-z). Power absorption due to E-perpendicular to and E-z is dominant for the hollow and parabolic n(p) profiles, respectively.